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Dr. Harold Haugen


Department of Engineering Physics

Femtosecond Laser Ablation and Micromachining
Areas of Specialization:
Research Clusters:
ABB 428
+1 905.525.9140 x 23335



Research Expertise

Femtosecond Laser Ablation and Micromachining

In recent years femtosecond laser ablation and micromachining has been an emerging area, offering new opportunities for materials processing due to the qualitatively different interactions of ultrashort light pulses with solids. The work in our laboratory on femtosecond laser – materials interactions covers a broad range, directed both at fundamental studies as well as applications. The ultrafast laser pulses can be utilized to modify materials on the nanometer or micron length scales, and undertake precision laser machining. In these projects, we work closely with the Canadian Centre for Electron Microscopy (CCEM) within the Brockhouse Institute for Materials Research. The capabilities of the CCEM enable detailed studies of the final state of laser-modified targets through a host of capabilities including transmission electron microscopy, scanning probe microscopy, focused ion beam techniques, high-resolution optical microscopy, and scanning electron microscopy. Our more recent research activities in this area have concentrated on potential applications in silicon photonics, and investigations of ripple formation at the buried interface in silicon dioxide/silicon samples.


Did you know…

Please note that I am no longer recruiting graduate students.