Processing - Cleanroom



The CEDT operates a Class 10000 cleanroom facility, available for the micro-processing of semiconductor and superconductor materials. The 1000 sqft work area is divided into two separate rooms.

The cleanroom facility is equipped for photolithographic processing and associated wet-chemistry, chemical vapour deposition, metallization, reactive ion etching, UV oxidation, and holography. This instrumentation is complemented with microscope stations, ellipsometry, surface profilometry, and additional related equipment.