Facilities
MBE/CVD laboratory.
Cleanroom facilities.
The CEDT operates and manages facilities and equipment for materials engineering, processing, and analysis.
Rate Structure: Fees are for Canadian University Users. Please call for Industrial Rates
Materials Growth
Processing
- » Class 10000 Cleanroom
- » Wet Benches
- » Metallization
- » ECR-Reactive Ion Etching
- » Silicon Reactive Ion Etching
- » SiON Chemical Vapour Deposition
- » Ellipsometry
- » Photolithography
- » Surface Profilometer
- » Stress Analysis
- » Holography
- » Plasma Asher
- » UV Ozone
- » Annealing
- » Electron Beam Lithography (EBL)
- » Reactive Ion Etching (RIE)
- » Dicing Saw